High Frequency AMT-266
| Specification | 0.5W-120M | 1.5W-120M | 3W-70M | 5W-70M |
| Central Wavelength (nm) | 266.08 ± 0.1 | |||
| Linewidth (pm; FWHM) | ≤20 | |||
| Output Power (W) | ≥0.5 | ≥1.5 | ≥3 | ≥5 |
| Repetition Rate (kHz) | ≥120 | ≥70 | ||
| Power Adjustment Range (%) | 90%-100% | 1%-100% | ||
| Output Power Stability (PV) | ≤0.5% @8h | |||
| RMS Noise | <1% rms (<3 MHz) | |||
| Beam Quality (M²) | ≤1.2 | |||
| Output Beam Waist Diameter & Position | 1.8mm ±10%, waist distance from output +/-2m | |||
| Ellipticity | ≥90% | |||
| Polarization | 100:1 Linear, Horizontal | |||
| Pulse-to-Pulse Intensity Variation (PV) | ≤5% | |||
| Pointing Stability after Replacement (urad) | ≤100 | |||
| Temperature Coefficient (urad/K) | <20 | |||
| Power Supply (V) | DC24V | |||
| Total Power / Consumption (W) | <250 | <450 | <800 | |
| Operating Temperature (°C) | 20-25 | |||
| Cooling Method | Water Cooling | |||
| Cooling Capacity Requirement | 300W | 500W | 1000W | |
| Power Monitoring | Internal PD | |||
| Lifetime (h) | ≥10000, single point ≥500 | |||
| Manual / Auto Replacement | Auto replacement | |||
Low Frequency AMT-266
| Specification | 1W-10K | 3W-100K |
| Wavelength (nm) | 266 | |
| Average Power (Watts) | >1 | >3W |
| Pulse Energy (μJ) | >130 | >30 |
| Specified Frequency (kHz) | 10 kHz | 100 kHz |
| Repetition Rate (kHz) | Single Shot-30 kHz | Single Shot-300 kHz |
| Pulse Width (ps) | <30 | |
| Beam Quality (M²) | <1.3 | |
| Beam Roundness (%) | >85 | |
| Beam Diameter (mm) | ~1.8 ±10% | |
| Divergence (mRad) | 0.3 ±10% | |
| Pointing Stability (μrad/°C) | <20 | |
| Polarization | 100:1 Linear, Horizontal | |
| Pulse-to-Pulse Stability (% RMS) | <3 | |
| Average Power Stability (% over 12 hours) | <3 | |
| Warm-up Time (mins) | <60 | |
| Standby Warm-up (mins) | <10 | |
| Operating Temperature (°C) | 15-35 | |
| Operating Humidity (%) | 20 to 80, Non-condensing | |
| Storage Temperature (°C) | -20 to 50 | |
| Storage Humidity (%) | 20 to 80, Non-condensing | |
| Power Supply (VDC/Watts) | 24 / 600 | |
| Communication Protocol | RS232 | |
| Cooling Method | Water | |
| Weight (kg) | 55 | |
High-stability 266nm picosecond UV laser with SYNC output and <3% power fluctuation. Ideal for semiconductor inspection, GaN lift-off, glass separation, and precision micromachining.
Product Pictures
Product Introduction
The AMT Series Deep UV Picosecond Laser is engineered for next-generation industrial micro-processing applications. Utilizing advanced 266nm intra-cavity frequency conversion technology, it delivers exceptional deep UV performance with maximum output power above 3W.
Designed for extreme precision, the AMT laser offers excellent beam quality (M² <1.3), high beam circularity (>90%), and stable power output (<3% fluctuation), ensuring superior micro-processing accuracy. Its innovative frequency conversion switching system guarantees unchanged beam parameters after switching, maintaining processing consistency and machine stability.
Equipped with self-developed high-reliability core modules—including an ultra-fast seed source and high-temperature nonlinear crystal system—the laser achieves a single-point lifetime exceeding 1000 hours and total system lifetime beyond 20,000 hours. The integrated cavity air-cleaning filtration system further enhances durability and crystal longevity.
The AMT Series supports SYNC synchronized output, edge trigger and level trigger control, and features a built-in power monitoring module for precise control. It is widely applied in:
Sapphire GaN separation
Carbon-free cold processing
Glass crystal separation
28nm and below semiconductor defect inspection
Large-aperture optical surface inspection
Polymer cutting
High-density optical data storage
The AMT Series is a high-performance solution for advanced semiconductor and precision industrial applications.
Application Cases
UV Picosecond
P-Coating Film Cutting
Smartphone Antenna Cutting
OLED Cutting
